[FEATURES]

• Vacuum Robot system

• 3axis control : R-axis, T-axis, Z-axis

• Servo motor with controller

• Repeatibility : less than ± 0.2mm

• Types for Applications

     . FTR-200V : 4~8 inch wafers, single/dual arm

     . FTR-300V : 12inch wafer, single/dual arm

     . FTR-300T : LED tray

     . Cluster system

     . 고객 주문사양 협의 가능